The available structuring methods, excellent adhesion to different materials and controllable optical properties make ORMOCER®s ideal coatings for the production of optical microsystems.
Their compatibility with traditional thin-film technology, simple means of processing (curing temperatures < 170 °C in standard atmosphere) and the possibility of creating microstructures (e.g. bumps or vias) are a guarantee for maximum flexibility and versatility, which is underlined by the fact that ORMOCER®s feature negative resist behavior.
Methods for creating microstructures:
- Standard photolithography process
- Laser ablation
- Laser direct writing
- (Precision-) Stamping
These advantages are completed by the excellent optical properties of (unfluorinated) ORMOCER®s and their dimensional stability.